Abstract
Background: This paper describes an analytical study of a bandpass filter that is based on the dynamic response of electrostatically-driven MEMS oscillators. Method of Approach: Unlike most mechanical and electrical filters that rely on direct linear resonance for filtering, the MEM filter presented in this work employs parametric resonance. Results: While the use of parametric resonance improves some filtering characteristics, the introduction of parametric instabilities into the system does present some complications with regard to filtering. Conclusions: The aforementioned complications can be largely overcome by implementing a pair of MEM oscillators with tuning schemes and some processing logic to produce a highly effective bandpass filter.
1.
Taylor
, J. T.
, and Huang
, Q.
, eds., 1997, CRC Handbook of Electrical Filters
, CRC Press
, Boca Raton, Florida, pp. 45
–142
, 353
–418
.2.
Johnson
, R. A.
, Borner
, M.
, and Konno
, M.
, 1971, “Mechanical Filters—A Review of Progress
,” IEEE Trans. Sonics Ultrason.
0018-9537, SU-18
, pp. 155
–170
.3.
Nguyen
, C. T.-C.
, 1999, “Micromechanical Filters for Miniaturized Low-Power Communications
,” 3673-19, Proceedings of SPIE: Smart Structures and Materials 1999: Smart Electronics and MEMS
, V. K.
Varadan
, ed., 3673
, pp. 55
–66
.4.
Shaw
, S. W.
, Turner
, K. L.
, Rhoads
, J. F.
, and Baskaran
, R.
, 2004, “Parametrically Excited MEMS-Based Filters
,” Proceedings of the IUTAM Symposium on Chaotic Dynamics and Control of Systems and Processes in Mechanics
(to be published).5.
Piekarski
, B.
, DeVoe
, D.
, Dubey
, M.
, Kaul
, R.
, Conrad
, J.
, and Zeto
, R.
, 2001, “Surface Micromachined Piezoelectric Resonant Beam Filters
,” Sens. Actuators, A
0924-4247, 91
, pp. 313
–320
.6.
Lin
, L.
, Howe
, R. T.
, and Pisano
, A. P.
, 1998, “Microelectromechanical Filters for Signal Processing
,” J. Microelectromech. Syst.
1057-7157, 7
, pp. 286
–294
.7.
Nguyen
, C. T.-C.
, 1995, “Micromechanical Resonators for Oscillators and Filters
,” Proceedings, 1995 IEEE International Ultrasonics Symposium
, pp. 489
–499
.8.
Wang
, K.
, and Nguyen
, C. T.-C.
, 1997, “High-Order Micromechanical Electronic Filters
,” Proceedings, 1997 IEEE International Micro Electro Mechanical Workshop
, pp. 25
–30
.9.
Turner
, K. L.
, Miller
, S. A.
, Hartwell
, P. G.
, MacDonald
, N. C.
, Strogatz
, S. H.
, and Adams
, S. G.
, 1998, “Five Parametric Resonances in a Microelectromechanical System
,” Nature (London)
0028-0836, 396
, pp. 149
–152
.10.
Machui
, J.
, Bauregger
, J.
, Riha
, G.
, and Schropp
, I.
, 1995, “SAW Devices in Cellular and Cordless Phones
,” 1995 IEEE Ultrasonics Symp. Proc.
, pp. 121
–130
.11.
Wright
, P. V.
, 1992, “A Review of SAW Resonator Filter Technology
,” 1992 IEEE Ultrasonics Symp. Proc.
, pp. 29
–38
.12.
Ishihara
, F.
, Koyamada
, Y.
, and Yoshikawa
, S.
, 1975, “Narrow Band Filters Using Surface Acoustic Wave Resonators
,” 1975 IEEE Ultrasonics Symp. Proc.
, pp. 381
–383
.13.
Tiersten
, H. F.
, and Smythe
, R. C.
, 1975, “Guided Acoustic Surface Wave Filters
,” 1975 IEEE Ultrasonics Symp. Proc.
, pp. 293
–294
.14.
Adams
, S. G.
, Bertsch
, F.
, and MacDonald
, N. C.
, 1998, “Independent Tuning of Linear and Nonlinear Stiffness Coefficients
,” J. Microelectromech. Syst.
1057-7157, 7
, pp. 172
–180
.15.
Zhang
, W.
, Baskaran
, R.
, and Turner
, K. L.
, 2003, “Tuning the Dynamic Behavior of Parametric Resonance in a Micromechanical Oscillator
,” Appl. Phys. Lett.
0003-6951, 82
, pp. 130
–132
.16.
Zhang
, W.
, Baskaran
, R.
, and Turner
, K. L.
, 2002, “Effect of Cubic Nonlinearity on Auto-Parametrically Amplified Resonant MEMS Mass Sensor
,” Sens. Actuators, A
0924-4247, 102
, pp. 139
–150
.17.
18.
Rhoads
, J. F.
, Shaw
, S. W.
, Tuner
, K. L.
, Moehlis
, J.
, and DeMartini
, B. E.
, 2004, “On the Response of Systems with Generalized Parametric Excitation Including Application to MEMS
,” (in preparation).Copyright © 2005
by American Society of Mechanical Engineers
You do not currently have access to this content.
