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Keywords: flow factors
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Journal Articles
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Tribol. July 2007, 129(3): 603–610.
Published Online: March 15, 2007
... in the continuum regime. Subsequently, pressure and shear flow factors are obtained by evaluating the velocity field in accordance with the extended Reynolds equation of Patir and Cheng ( 1978, ASME J. Tribol., 100, pp. 12–17 ). The approach allows an efficient determination of the hydrodynamic characteristics...
Journal Articles
Publisher: ASME
Article Type: Article
J. Tribol. April 2005, 127(2): 287–292.
Published Online: April 7, 2005
...Sum Huan Ng; C. Fred Higgs,, III; Inho Yoon; Steven Danyluk Pressure and shear flow factors (Patir and Cheng, 1978) were used to take into account the roughness of the pad surface in the modeling of the interfacial fluid pressure during chemical mechanical polishing. An attempt was made to explain...