Skip Nav Destination
Close Modal
Update search
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
Filter
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- ISBN-10
- ISSN
- EISSN
- Issue
- Journal Volume Number
- References
- Conference Volume Title
- Paper No
NARROW
Format
Publisher
Journal
eBook Series
Article Type
Subject Area
Topics
Date
Availability
1-4 of 4
H. Suga
Close
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Sort by
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2017, 5(2): 021004.
Paper No: JMNM-15-1070
Published Online: March 23, 2017
eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1989
ISBN-10: 0-8031-1273-4
ISBN: 978-0-8031-1273-5
eBook Chapter
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1987
ISBN-10: 0-8031-0459-6
ISBN: 978-0-8031-0459-4
eBook Chapter
Book: Semiconductor Processing
Series: ASTM Selected Technical Papers
Publisher: ASTM International
Published: 1984
ISBN-10: 0-8031-0403-0
ISBN: 978-0-8031-0403-7