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Keywords: nanomachining
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Journal Articles
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2015, 3(1): 011001.
Paper No: JMNM-13-1071
Published Online: October 30, 2014
.... molecular dynamics simulation nanomachining VANILA tool wear VANILA process, a nanomachining process that uses a single-point AFM probe with loose abrasives and vibration assistance, is suitable to perform target specific machining of nanoscale features on hard and brittle materials...