1-1 of 1
Keywords: nanolithography
Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2022, 10(2): 021005.
Paper No: JMNM-22-1031
Published Online: February 1, 2023
...Huimin Zhou; Yingchun Jiang; Changhong Ke; Jia Deng Atomic force microscope (AFM)-based nanolithography is a cost-effective nanopatterning technique that can fabricate nanostructures with arbitrary shapes. However, existing AFM-based nanopatterning approaches have limitations in the patterning...