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Keywords: nanofabrication
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2022, 10(2): 021005.
Paper No: JMNM-22-1031
Published Online: February 1, 2023
... resolution and efficiency. Minimum feature size and machining performance in the mechanical force-induced nanofabrication process are limited by the radius and sharpness of the AFM tip. Electric-field-assisted atomic force microscope (E-AFM) nanolithography can fabricate nanopatterns with features smaller...