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Keywords: metal assisted chemical etch
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2022, 10(2): 021002.
Paper No: JMNM-22-1020
Published Online: September 27, 2022
...Crystal Barrera; Paras Ajay; Akhila Mallavarapu; Mark Hrdy; S. V. Sreenivasan Metal-assisted chemical etching (MacEtch) of silicon shows reliable vertical anisotropic wet etching only in single-crystal silicon, which limits its applications to a small number of devices. This work extends...
