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Journal Articles

Electric-Field-Assisted Contact Mode Atomic Force Microscope-Based Nanolithography With Low Stiffness Conductive Probes

Huimin Zhou, Yingchun Jiang, Christopher M. Dmuchowski, Changhong Ke, Jia Deng
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2022, 10(1): 011001.
Paper No: JMNM-21-1055
https://doi.org/10.1115/1.4054316
Published Online: April 28, 2022
View Article titled, Electric-Field-Assisted Contact Mode Atomic Force Microscope-Based Nanolithography With Low Stiffness Conductive Probes
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Topics: Atomic force microscopy, Electric fields, Lithography, Nanolithography, Probes, Resolution (Optics), Stiffness, Polymer films, Polymers, Fundamental forces (Physics)
Includes: Supplementary data
Journal Articles

Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry

Jonas Skovlund Madsen, Poul Erik Hansen, Pierre Boher, Deepak Dwarakanath, Jan Friis Jørgensen, Brian Bilenberg, Jesper Nygård, Morten Hannibal Madsen
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2017, 5(3): 031005.
Paper No: JMNM-16-1073
https://doi.org/10.1115/1.4036889
Published Online: June 7, 2017
View Article titled, Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
Open the PDF for Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry in another window
Topics: Atomic force microscopy, Diffraction, Diffraction gratings, Imaging, Lenses (Optics), Microscopes, Wavelength