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Keywords: photolithography
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Journal Articles
Publisher: ASME
Article Type: Design Of Medical Devices Conference Abstracts
J. Med. Devices. June 2008, 2(2): 027561.
Published Online: June 26, 2008
... developed a composite membrane which integrates the nanoscale size selectivity of block-copolymers with the mechanical strength and order of micromachined silicon. A silicon wafer was coated with low-stress silicon nitride (LSN) and patterned with 20 μ m squares on the bottom side by photolithography...