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Keywords: microgyroscope
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Journal Articles
Journal:
Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. November 2011, 133(11): 111002.
Published Online: November 11, 2011
... 11 11 2011 Coriolis force damping design engineering gyroscopes micromachining micromechanical devices torque vibrations microelectromechanical systems (MEMS) microgyroscope comb-drive actuator MetalMUMPs finite element method (FEM) A vibratory microgyroscope...
