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Keywords: planarisation
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2005, 127(3): 545–554.
Published Online: October 12, 2004
... , pp. 27 – 32 . 21 07 2003 12 10 2004 planarisation surface finishing chemical mechanical polishing semiconductor technology particle size abrasives Precision finishing and planarization are becoming integral process steps in multilevel metallization designs...
