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Keywords: laser ablation of silicon carbide
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. April 2011, 133(2): 021006.
Published Online: March 11, 2011
... treatment laser ablation of silicon carbide laser micromachining Silicon carbide, due to its unique properties, has many promising applications in optics, electronics, and many other areas. These areas often require material micromachining to create microfeatures needed in microdevices ( 1...
