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Journal Articles

Reaction-Diffusion Modeling of Photopolymerization During Femtosecond Projection Two-Photon Lithography

Rushil Pingali, Sourabh K. Saha
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. February 2022, 144(2): 021011.
Paper No: MANU-21-1316
https://doi.org/10.1115/1.4051830
Published Online: August 5, 2021
View Article titled, Reaction-Diffusion Modeling of Photopolymerization During Femtosecond Projection Two-Photon Lithography
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Topics: Diffusion (Physics), Lasers, Lithography, Modeling, Photons, Polymerization, Printing, Simulation, Nanowires, Photopolymers
Journal Articles

Multiphysics Modeling and Experiments of Grayscale Photopolymerization With Application to Microlens Fabrication

M. M. Emami, M. Jamshidian, D. W. Rosen
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. September 2021, 143(9): 091005.
Paper No: MANU-20-1680
https://doi.org/10.1115/1.4050549
Published Online: March 30, 2021
View Article titled, Multiphysics Modeling and Experiments of Grayscale Photopolymerization With Application to Microlens Fabrication
Open the PDF for Multiphysics Modeling and Experiments of Grayscale Photopolymerization With Application to Microlens Fabrication in another window
Topics: Chemical reactions, Lithography, Manufacturing, Modeling, Production planning, Resins, Simulation, Temperature, Ultraviolet radiation, Polymerization
Journal Articles

Thermal Modeling of Ultraviolet Nanoimprint Lithography

Bhavik C. Patel, Ankur Jain
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. December 2013, 135(6): 064501.
Paper No: MANU-13-1184
https://doi.org/10.1115/1.4025564
Published Online: November 5, 2013
View Article titled, Thermal Modeling of Ultraviolet Nanoimprint Lithography
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Topics: Design, Lithography, Modeling, Nanomanufacturing, Semiconductor wafers, Temperature, Tradeoffs, Ultraviolet radiation, Thermal management, Heat