Processing Optimization in Multiheating Positions for Laser Thermal Adjustment of Actuators

Laser thermal adjustment as an application of laser forming in microsystems attracts much attention. Previous work on laser thermal adjustment of the two-bridge actuator (TBA) shows that the deformations induced by laser forming are limited. In this paper, an actuator with three cut-outs including six heating positions is designed to enhance the deformation range. A deformation model is developed for such an actuator by introducing the factors of the in-plane and out-of-plane angles to the TBA's formula, which takes energy constraints into account to avoid the melting phenomenon and negative deformations. The deformation range of the three cut-outs actuator (TCA) is determined by using the relation between in-plane and out-of-plane angles of the TBA. The optimization of the processing parameters for the TCA is conducted to reach the designed target position based on the optimization algorithm of adaptive simulated annealing (ASA). The model prediction is validated by the finite-element analysis (FEA) simulation and experiments.