Micro/meso scale parts, connectors, and couplers in optic communication and arbitrary 3D features are required in various fields of industry. In this paper, a miniaturized machine tool is developed to machine arbitrary 3D features in the micro/meso scale based on CNC and PC-NC technology. In the proposed system, a PI controller with antiwindup capability is adopted which helps micro/meso scale machining of components. For performance evaluation, a V groove and a 3D feature are machined using the proposed miniaturized machine tool.
1.
de Labachelerie
, M.
, Kaou
, N.
, Armbruster
, V.
, Jeannot
, J. C.
, Mollier
, P.
, Porte
, H.
, and Devoldere
, N.
, 2001, “A Micromachined Connector for the Coupling of Optical Waveguides and Ribbon Optical Fibers
,” Sens. Actuators, A
0924-4247, 89
(1/2
), pp. 36
–42
.2.
Bao
, M.
, and Wang
, W.
, 1996, “Future of Microelectromechanical Systems (MEMS)
,” Sens. Actuators, A
0924-4247, 56
(1-2
), pp. 135
–141
.3.
Sugioka
, K.
, Obata
, K.
, Midorikawa
, K.
, Hong
, M. H.
, Wu
, D. J.
, Wong
, L. L.
, Lu
, Y. F.
, and Chong
, T. C.
, 2003, “Advanced Materials Processing Based on Interaction of Laser Beam and a Medium
,” J. Photochem. Photobiol., A
1010-6030, 158
(2-3
), pp. 171
–178
.4.
Koren
, Y.
, 1983, Computer Control of Manufacturing Systems
, McGraw-Hill
, New York.5.
Yang
, M. Y.
, and Hong
, W. P.
, 2001, “PC-NC Milling Machine With New Simultaneous 3-Axis Control Algorithm
,” Int. J. Mach. Tools Manuf.
0890-6955, 41
(4
), pp. 555
–566
.6.
Cusin
, P.
, Sawai
, T.
, and Konishi
, S.
, 2000, “Compact and Precise Positioner Based on the Inchworm Principle
,” J. Micromech. Microeng.
0960-1317, 10
(4
), pp. 516
–521
.7.
Tan
, K. K.
, Lee
, Tong Heng
, and Zhou
, Huixing X.
, , 2001, “Micro-Positioning of Linear-Piezoelectric Motors Based on a Learning Nonlinear PID Controller
,” IEEE/ASME Trans. Mechatron.
1083-4435, 6
(4
), pp. 428
–436
.8.
Staufenberg
, Jr., C. W.
, and Hubbell
, R. J.
, 1985, “Piezoelectric Electromechanical Translation Apparatus and Method
, U.S. Patent No. #4,622,483.9.
Southward
, S. C.
, Radcliffe
, C. J.
, and MacCluer
, C. R.
, 1991, “Robust Nonlinear Stick-Slip Friction Compensation
,” ASME J. Dyn. Syst., Meas., Control
0022-0434, 113
, pp. 639
–644
.10.
Bohn
, C.
, and Atherton
, D. P.
, 1995, “An Analysis Package Comparing PID Anti-Windup Strategies
,” IEEE Control Syst. Mag.
0272-1708, 15
(2
), pp. 34
–40
.11.
Grimm
, G.
, Hatfield
, J.
, Postlethwaite
, I.
, Teel
, A. R.
, Turner
, M. C.
, and Zaccarian
, L.
, 2003, “Antiwindup for Stable Linear Systems with Input Saturation: An LMI-Based Synthesis
,” IEEE Trans. Autom. Control
0018-9286, 48
(9
), pp. 1509
–1525
.12.
Tyan
, F.
, and Berstein
, D. S.
, 1994, “Antiwindup Compensator Synthesis for Systems with Saturating Actuators
,” in Proceedings of the 33rd IEEE Conference on Decision and Control, Vol. 1
, pp. 150
–155
.13.
Hang
, C. C.
, Astrom
, K. J.
, and Wang
, Q. G.
, 2002, “Relay Feedback Auto-Tuning of Process Controllers—A Tutorial Review
,” J. Process Control
0959-1524, 12
(1
), pp. 143
–162
.14.
Zigler
, J. G.
, and Nichols
, N. B.
, 1942, “Optimum Settings for Automatic Controllers
,” Trans. ASME
0097-6822, 64
, pp. 759
–768
.15.
Schaller
, Th.
, Bohn
, L.
, Mayer
, J.
, and Schubert
, K.
, 1999, “Microstructure Grooves With a Width of Less Than 50μm Cut With Ground Hard Metal Micro End Mills
,” Precis. Eng.
0141-6359, 23
(4
), pp. 229
–235
.16.
Vasile
, M. J.
, Friedrich
, C. R.
, Kikkeri
, B.
, and Mcelhannon
, R.
, 1996, “Micrometer-Scale Machining: Tool Fabrication and Initial Results
,” Precis. Eng.
0141-6359, 19
(2-3
), pp. 180
–186
.17.
Weck
, M.
, Fischer
, S.
, and Vos
, M.
, 1997, “Fabrication of Microcomponents Using an Ultraprecision Machine Tool
,” Nanotechnology
0957-4484, 8
(3
), pp. 145
–148
.Copyright © 2006
by American Society of Mechanical Engineers
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