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Keywords: Rayleigh scattering
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Journal Articles

Flow Visualizations and Transient Temperature Measurements in an Axisymmetric Impinging Jet Rapid Thermal Chemical Vapor Deposition Reactor

A. G. Mathews, J. E. Peterson
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Technical Papers
J. Heat Mass Transfer. June 2002, 124(3): 564–570.
https://doi.org/10.1115/1.1469525
Published Online: May 10, 2002
... visualisation temperature measurement jets chaos flow instability rapid thermal processing convection Rayleigh scattering Experimental Mixed Convection Temperature Thin Films Transient The formation of thin films of semiconductors is an important technology...
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Topics: Buoyancy, Chemical vapor deposition, Flow (Dynamics), Flow visualization, High temperature, Light scattering, Momentum, Temperature, Temperature measurement, Transients (Dynamics)
Journal Articles

Rayleigh Light Scattering Measurements of Transient Gas Temperature in a Rapid Chemical Vapor Deposition Reactor

J. F. Horton, J. E. Peterson
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Technical Papers
J. Heat Mass Transfer. February 2000, 122(1): 165–170.
https://doi.org/10.1115/1.521447
Published Online: September 7, 1999
... in Turbulent Flames via Rayleigh Scattering,” Laser Probes for Combustion Chemistry , D. R. Crosley ed., American Chemical Society, pp. 435–441. Horton , J. F. , and Peterson , J...
View Article titled, Rayleigh Light Scattering Measurements of Transient Gas Temperature in a Rapid Chemical Vapor Deposition Reactor
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Topics: Chemical vapor deposition, Flow (Dynamics), Flow visualization, Light scattering, Mixed convection, Semiconductor wafers, Temperature, Temperature measurement, Transients (Dynamics), Lasers