Abstract
In this work, a numerical model to predict the heat accumulation of fused silica induced by ultrafast laser scanning is put forward, which is composed of an ionization model and a steady electromagnetic model. The ionization model is to obtain the energy deposition induced by single laser pulse. Subsequently, the temperature evolution during ultrafast laser scanning is estimated through the superposition of the heat impact by each laser pulse. The ablated profile from experiments is compared with the predicted profile of heat-affected zone (HAZ) to illustrate the nonthermal processing window, which is validated by Raman spectrum. The analysis of the parametric sensitivity on heat accumulation is carried out, and the laser pulse energy is the dominating factor.
Issue Section:
Heat and Mass Transfer
References
1.
Sugioka
,
K.
, 2017
, “
Progress in Ultrafast Laser Processing and Future Prospects
,” Nanophotonics
,
6
(2
), pp. 393
–413
.10.1515/nanoph-2016-00042.
Sugioka
,
K.
, and
Cheng
,
Y.
, 2014
, “
Ultrafast Lasers-Reliable Tools for Advanced Materials Processing
,” Light: Sci. Appl.
,
3
(4
), pp. e149
–e149
.10.1038/lsa.2014.303.
Ben-Yakar
,
A.
, and
Byer
,
R. L.
, 2002
, “
Femtosecond Laser Machining of Fluidic Microchannels for Miniaturized Bioanalytical Systems
,” Proc. SPIE
, 4637, p. 212
.10.1117/12.4706254.
Streltsov
,
A. M.
, and
Borrelli
,
N. F.
, 2002
, “
Study of Femtosecond-Laser-Written Waveguides in Glasses
,” Josa B
,
19
(10
), pp. 2496
–2504
.10.1364/JOSAB.19.0024965.
Cheng
,
J.
,
Perrie
,
W.
,
Edwardson
,
S.
,
Fearon
,
E.
,
Dearden
,
G.
, and
Watkins
,
K.
, 2009
, “
Effects of Laser Operating Parameters on Metals Micromachining With Ultrafast Lasers
,” Appl. Surface Sci.
,
256
(5
), pp. 1514
–1520
.10.1016/j.apsusc.2009.09.0136.
Di Niso
,
F.
,
Gaudiuso
,
C.
,
Sibillano
,
T.
,
Mezzapesa
,
F. P.
,
Ancona
,
A.
, and
Lugarà
,
P. M.
, 2014
, “
Role of Heat Accumulation on the Incubation Effect in Multi-Shot Laser Ablation of Stainless Steel at High Repetition Rates
,” Opt. Exp.
,
22
(10
), pp. 12200
–12210
.10.1364/OE.22.0122007.
Vogel
,
A.
,
Noack
,
J.
,
Hüttman
,
G.
, and
Paltauf
,
G.
, 2005
, “
Mechanisms of Femtosecond Laser Nanosurgery of Cells and Tissues
,” Appl. Phys. B
,
81
(8
), pp. 1015
–1047
.10.1007/s00340-005-2036-68.
Miyamoto
,
I.
,
Cvecek
,
K.
,
Okamoto
,
Y.
, and
Schmidt
,
M.
, 2014
, “
Internal Modification of Glass by Ultrashort Laser Pulse and Its Application to Microwelding
,” Appl. Phys. A
,
114
(1
), pp. 187
–208
.10.1007/s00339-013-8115-39.
Sun
,
M.
,
Eppelt
,
U.
,
Schulz
,
W.
, and
Zhu
,
J.
, 2013
, “
Role of Thermal Ionization in Internal Modification of Bulk Borosilicate Glass With Picosecond Laser Pulses at High Repetition Rates
,” Opt. Mater. Exp.
,
3
(10
), pp. 1716
–1726
.10.1364/OME.3.00171610.
Rahaman
,
A.
,
Kar
,
A.
, and
Yu
,
X.
, 2019
, “
Thermal Effects of Ultrafast Laser Interaction With Polypropylene
,” Opt. Exp.
,
27
(4
), pp. 5764
–5783
.10.1364/OE.27.00576411.
Bauer
,
F.
,
Michalowski
,
A.
,
Kiedrowski
,
T.
, and
Nolte
,
S.
, 2015
, “
Heat Accumulation in Ultra-Short Pulsed Scanning Laser Ablation of Metals
,” Opt. Exp.
,
23
(2
), pp. 1035
–1043
.10.1364/OE.23.00103512.
Wang
,
H.
,
Shen
,
H.
, and
Yao
,
Z.
, 2019
, “
A Two-Step Model for Multiple Picosecond and Femtosecond Pulses Ablation of Fused Silica
,” ASME J. Manuf. Sci. Eng.
,
141
(6
), p. 061004
.10.1115/1.404330813.
Mao
,
S.
,
Quéré
,
F.
,
Guizard
,
S.
,
Mao
,
X.
,
Russo
,
R.
,
Petite
,
G.
, and
Martin
,
P.
, 2004
, “
Dynamics of Femtosecond Laser Interactions With Dielectrics
,” Appl. Phys. A
,
79
(7
), pp. 1695
–1709
.10.1007/s00339-004-2684-014.
Jiang
,
L.
, and
Tsai
,
H.-L.
, 2008
, “
A Plasma Model Combined With an Improved Two-Temperature Equation for Ultrafast Laser Ablation of Dielectrics
,” J. Appl. Phys.
,
104
(9
), p. 093101
.10.1063/1.300612915.
Chimier
,
B.
,
Utéza
,
O.
,
Sanner
,
N.
,
Sentis
,
M.
,
Itina
,
T.
,
Lassonde
,
P.
,
Légaré
,
F.
,
Vidal
,
F.
, and
Kieffer
,
J.
, 2011
, “
Damage and Ablation Thresholds of Fused-Silica in Femtosecond Regime
,” Phys. Rev. B
,
84
(9
), p. 094104
.10.1103/PhysRevB.84.09410416.
Du
,
D.
,
Liu
,
X.
,
Korn
,
G.
,
Squier
,
J.
, and
Mourou
,
G.
, 1994
, “
Laser-Induced Breakdown by Impact Ionization in SiO2 With Pulse Widths From 7 ns to 150 fs
,” Appl. Phys. Lett.
,
64
(23
), pp. 3071
–3073
.10.1063/1.11135017.
Tien
,
A.-C.
,
Backus
,
S.
,
Kapteyn
,
H.
,
Murnane
,
M.
, and
Mourou
,
G.
, 1999
, “
Short-Pulse Laser Damage in Transparent Materials as a Function of Pulse Duration
,” Phys. Rev. Lett.
,
82
(19
), pp. 3883
–3886
.10.1103/PhysRevLett.82.388318.
Sudrie
,
L.
,
Couairon
,
A.
,
Franco
,
M.
,
Lamouroux
,
B.
,
Prade
,
B.
,
Tzortzakis
,
S.
, and
Mysyrowicz
,
A.
, 2002
, “
Femtosecond Laser-Induced Damage and Filamentary Propagation in Fused Silica
,” Phys. Rev. Lett.
,
89
(18
), p. 186601
.10.1103/PhysRevLett.89.18660119.
Balling
,
P.
, and
Schou
,
J.
, 2013
, “
Femtosecond-Laser Ablation Dynamics of Dielectrics: Basics and Applications for Thin Films
,” Rep. Prog. Phys.
,
76
(3
), p. 036502
.10.1088/0034-4885/76/3/03650220.
Sun
,
M.
,
Eppelt
,
U.
,
Russ
,
S.
,
Hartmann
,
C.
,
Siebert
,
C.
,
Zhu
,
J.
, and
Schulz
,
W.
, 2013
, “
Numerical Analysis of Laser Ablation and Damage in Glass With Multiple Picosecond Laser Pulses
,” Opt. Exp.
,
21
(7
), pp. 7858
–7867
.10.1364/OE.21.00785821.
Lenzner
,
M.
,
Krüger
,
J.
,
Sartania
,
S.
,
Cheng
,
Z.
,
Spielmann
,
C.
,
Mourou
,
G.
,
Kautek
,
W.
, and
Krausz
,
F.
, 1998
, “
Femtosecond Optical Breakdown in Dielectrics
,” Phys. Rev. Lett.
,
80
(18
), pp. 4076
–4079
.10.1103/PhysRevLett.80.407622.
Stakgold
,
I.
, and
Holst
,
M. J.
, 2011
, Green's Functions and Boundary Value Problems
,
Wiley
,
New York
.23.
Finger
,
J.
,
Bornschlegel
,
B.
,
Reininghaus
,
M.
,
Dohrn
,
A.
,
Nießen
,
M.
,
Gillner
,
A.
, and
Poprawe
,
R.
, 2018
, “
Heat Input and Accumulation for Ultrashort Pulse Processing With High Average Power
,” Adv. Opt. Technol.
,
7
(3
), pp. 145
–155
.10.1515/aot-2018-000824.
Galeener
,
F.
,
Barrio
,
R.
,
Martinez
,
E.
, and
Elliott
,
R.
, 1984
, “
Vibrational Decoupling of Rings in Amorphous Solids
,” Phys. Rev. Lett.
,
53
(25
), pp. 2429
–2432
.10.1103/PhysRevLett.53.242925.
Walrafen
,
G. E.
, and
Krishnan
,
P.
, 1982
, “
Model Analysis of the Raman Spectrum From Fused Silica Optical Fibers
,” Appl. Optics
,
21
(3
), pp. 359
–360
.10.1364/AO.21.00035926.
Dussauze
,
M.
,
Rodriguez
,
V.
,
Lipovskii
,
A. A.
,
Petrov
,
M.
,
Smith
,
C.
,
Richardson
,
K.
,
Cardinal
,
T.
,
Fargin
,
E.
, and
Kamitsos
,
E. I.
, 2010
, “
How Does Thermal Poling Affect the Structure of Soda-Lime Glass?
,” J. Phys. Chem. C
,
114
(29
), pp. 12754
–12759
.10.1021/jp103390527.
Burgin
,
J.
,
Guillon
,
C.
,
Langot
,
P.
,
Vallee
,
F.
,
Hehlen
,
B.
, and
Foret
,
M.
, 2008
, “
Vibrational Modes and Local Order in Permanently Densified Silica Glasses: Femtosecond and Raman Spectroscopy Study
,” Phys. Rev. B
,
78
(18
), p. 184203
.10.1103/PhysRevB.78.18420328.
Galeener
,
F. L.
, and
Lucovsky
,
G.
, 1976
, “
Longitudinal Optical Vibrations in Glasses: GeO2 and SiO2
,” Phys. Rev. Lett.
,
37
(22
), pp. 1474
–1478
.10.1103/PhysRevLett.37.147429.
Pasquarello
,
A.
, and
Car
,
R.
, 1998
, “
Identification of Raman Defect Lines as Signatures of Ring Structures in Vitreous Silica
,” Phys. Rev. Lett.
,
80
(23
), pp. 5145
–5147
.10.1103/PhysRevLett.80.514530.
Sun
,
M.
,
Eppelt
,
U.
,
Hartmann
,
C.
,
Schulz
,
W.
,
Zhu
,
J.
, and
Lin
,
Z.
, 2016
, “
Damage Morphology and Mechanism in Ablation Cutting of Thin Glass Sheets With Picosecond Pulsed Lasers
,” Opt. Laser Technol.
,
80
, pp. 227
–236
.10.1016/j.optlastec.2016.01.023Copyright © 2021 by ASME
You do not currently have access to this content.
