Design and Test of Carbon Nanotube Biwick Structure for High-Heat-Flux Phase Change Heat Transfer

With the increase in power consumption in compact electronic devices, passive heat transfer cooling technologies with high-heat-flux characteristics are highly desired in microelectronic industries. Carbon nanotube (CNT) clusters have high thermal conductivity, nanopore size, and large porosity and can be used as wick structure in a heat pipe heatspreader to provide high capillary force for high-heat-flux thermal management. This paper reports investigations of high-heat-flux cooling of the CNT biwick structure, associated with the development of a reliable thermometer and high performance heater. The thermometer/heater is a 100-nm-thick and $600μm$ wide Z-shaped platinum wire resistor, fabricated on a thermally oxidized silicon substrate of a CNT sample to heat a $2×2mm2$ wick area. As a heater, it provides a direct heating effect without a thermal interface and is capable of high-temperature operation over $800°C$⁠. As a thermometer, reliable temperature measurement is achieved by calibrating the resistance variation versus temperature after the annealing process is applied. The thermally oxidized layer on the silicon substrate is around $1-μm$-thick and pinhole-free, which ensures the platinum thermometer/heater from the severe CNT growth environments without any electrical leakage. For high-heat-flux cooling, the CNT biwick structure is composed of $250μm$ tall and $100μm$ wide stripelike CNT clusters with $50μm$ stripe-spacers. Using $1×1cm2$ CNT biwick samples, experiments are completed in both open and saturated environments. Experimental results demonstrate $600W/cm2$ heat transfer capacity and good thermal and mass transport characteristics in the nanolevel porous media.