Transient bubble formation experiments are investigated on polysilicon micro-resisters having dimensions of 95 μm in length, 10 μm or 5 μm in width, and 0.5 μm in thickness. Micro resisters act as both resistive heating sources and temperature transducers simultaneously to measure the transient temperature responses beneath the thermal bubbles. The micro bubble nucleation processes can be classified into three groups depending on the levels of the input current. When the input current level is low, no bubble is nucleated. In the middle range of the input current, a single spherical bubble is nucleated with a waiting period up to 2 sec while the wall temperature can drop up to 8°C depending on the magnitude of the input current. After the formation of a thermal bubble, the resister temperature rises and reaches a steady state eventually. The bubble growth rate is found proportional to the square root of time that is similar to the heat diffusion controlled model as proposed in the macro scale boiling experiments. In the group of high input current, a single bubble is nucleated immediately after the current is applied. A first-order model is proposed to characterize the transient bubble nucleation behavior in the micro-scale and compared with experimental measurements.

Issue Section:
Technical Papers
Keywords:
silicon, bubbles, resistors, micromechanical devices, integrated circuit packaging, Bubble Growth, Heat Transfer, Microscale, Phase Change, Transient
Topics:
Boiling, Bubbles, Polysilicon, Temperature, Transients (Dynamics), Heat transfer, Wall temperature
1.
Cotter, T. P., 1984, “Principles and Prospects of Micro heat Pipes,” Proc. 5th Int’l. Heat Pipe Conf., Tsukuba, Japan, pp. 328–335.
2.
Bar-Cohen
,
A.
,
1983
, “
Thermal Design of Immersion Cooling Modules for Electronic Components
,”
Heat Transfer Eng.
,
4
, No. 3-4, pp.
35
–
50
.
3.
Niellsen
,
N. J.
,
1985
, “
History of Thinkjet Printerhead Development
,”
HP Journal
,
36
, No.
5
, pp.
4
–
10
.
4.
Lin
,
L.
and
Pisano
,
A. P.
,
1994
, “
Thermal Bubble Powered Microactuators
,”
Microsystem Technol.
,
1
, pp.
51
–
58
.
5.
Lin
,
L.
and
Pisano
,
A. P.
,
1998
, “
Thermal Bubble Formation on Polysilicon Micro Resisters
,”
ASME Journal of Heat Transfer
,
120
, No.
3
, pp.
735
–
742
.
6.
Yuan
,
H.
,
Oguz
,
H. N.
,
Prosperetti
,
A.
,
1999
, “
Growth and Collapse of a Vapor Bubble in a Small Tube
,”
Int. J. Heat Mass Transf.
,
42
, pp.
3643
–
3657
.
7.
Tsai, J. H., and Lin, L., 2001, “A Thermal Bubble Actuated Micro Nozzle-Diffuser Pump,” IEEE 2001 Micro Electro Mechanical System Workshop, Interlaken, Switzerland, pp. 409–412.
8.
Evans, J. D., and Liepmann, D., 1999, “The Bubble Spring and Channel (BSAC) Valve: An Actuated, Bi-stable Mechanical Valve for In-Plane Fluid Control,” Transducer’99, Sendai, Japan, pp. 1122–1125.
9.
Lin
,
L.
,
Udell
,
K. S.
, and
Pisano
,
A. P.
,
1994
, “
Liquid-Vapor Phase Transition and Bubble Formation in Micro Structures
,”
Therm. Sci. Eng.
,
2
pp,
52
–
59
.
10.
Yang
,
W. J.
, and
Tsutsui
,
K.
,
2000
, “
Overview of Boiling on Microstructures- Macro Bubbles From Micro Heaters
,”
Microscale Thermophys. Eng.
,
4
, No.
1
, pp.
7
–
24
.
11.
Cole, R. 1974, “Boiling Nucleation,” in Advances in Heat Transfer, Vol. 10, Academic, New York.
12.
Hsu
,
Y. Y.
,
1962
, “
On the size Range of Active Nucleation Cavities on a Heating Surface
,”
ASME Journal of Heat Transfer
,
84C
, pp.
207
–
216
.
13.
Sernas
,
V.
and
Hooper
,
F. C.
,
1969
, “
The Initial Vapor Bubble Growth on a Heated Wall during Nucleation Boiling
,”
Int. J. Heat Mass Transf.
,
12
, pp.
1627
–
1639
.
14.
Moore
,
F. D.
and
Mesler
,
R. B.
,
1961
, “
The Measurement of Rapid Surface Temperature Fluctuations During Nucleate Boiling of Water
,”
AIChE J.
,
7
, No.
4
, pp.
620
–
624
.
15.
Koester, D., Mhedevan, R., and Marcus, K., 1999, Multi-User MEMS Processes (MUMPS) Design Handbook, rev. 4, May 1999, Cronos Integrated Microsystems, 3021 Cornwallis Road, Research Triangle Park, NC, 27709.
16.
Mastrangelo, C. H., 1991, Ph.D. thesis, University of California at Berkeley, Berkeley, CA.
17.
Lin, L., 1993, Ph.D. thesis, University of California at Berkeley, Berkeley, CA.
18.
Carslaw, H. S., and Jaeger, J. C., 1959, Conduction of Heat in Solids, 2nd ed., Oxford University Press, London, pp. 99–100.
19.
Vargaftik, N. B., 1975, Tables on the Thermophysical Properties of Liquids and Gases, Hemisphere Pub. Corp., Bristol, PA, pp. 418–420.
20.
Stralen, S. V., and Cole, R., 1979, Boiling Phenomena, Vol. 1, Hemisphere Pub. Crop., Bristol, PA, pp. 454–456.
21.
Goldstein
,
R. J.
,
Volino
,
R. J.
,
1995
, “
Onset and Development of Natural Convection Above a Suddenly Heated Horizontal Surface
,”
ASME Journal of Heat Transfer
, ,
117
, No.
4
, pp.
808
–
821
.
22.
Shimokubo, T., Takagi, S., and Inoue, T., 1998, “Boiling Bubble Behavior form the Micro Heater,” Proc. 35th Heat Transfer Symp. of Japan, pp. 173–174.
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