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Keywords: thin film circuits
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Electron. Packag. June 2010, 132(2): 021003.
Published Online: June 11, 2010
... thin film circuits EM high purity Al film grain boundary diffusion AFD activation energy Thin films, which are thin material layers ranging from fractions of a nanometer to several micrometers in thickness, play an important role in microelectronic devices. Typically, aluminum (Al...
Journal Articles