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Keywords: AFD
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Electron. Packag. June 2010, 132(2): 021003.
Published Online: June 11, 2010
... in such sputtered polycrystalline Al films. The atomic flux divergence is the number of atoms per unit time and unit volume migrating due to EM. For a positive value of AFD , voids are formed by EM. Conversely, for a negative value, hillocks are formed. Van Horn , K. R. , 1967 , Aluminum, Vol. I...