... 2011 micropumps microsensors parametric devices resonance Micro-electromechanical systems (MEMS) chemical mass sensors and similar devices often operate by detection of shifts in resonant frequencies associated with the presence of a target analyte [( 1 2 3 4 5 6 )]. This sensing...

...Helen M. S. Georgiou; Ridha Ben Mrad In most piezoelectric applications, including precision motion control, pressure regulation in micropumps, and force control in microactuators, there is a need to develop a model that accounts for hysteresis and describes both the electrical and mechanical...