When a parallel-plate electrostatic actuator (ESA) is driven by a voltage source, pull-in instability limits the range of displacement to one-third of the gap between plates. In this paper, a nonlinear active disturbance rejection controller (NADRC) is originally developed on the ESA. Our control objectives are stabilizing and increasing the displacement of an ESA to 99.99% of its full gap. Most of the reported controllers in literature are based on linearized models of the ESAs and depend on detailed model information of them. However, the ESA is inherently nonlinear and has model uncertainties due to the imperfections of microfabrication and packaging. The NADRC consists of a nonlinear extended state observer (NESO) and a feedback controller. The NESO is used to estimate system states and unknown nonlinear dynamics for the ESA. Therefore, it does not require accurate model. We simulate the NADRC on a nonlinear ESA in the presences of external disturbance, system uncertainties, and noise. The simulation results verify the effectiveness of the controller by successfully extending the travel range of ESA beyond pull-in point. They also demonstrate that the controller is robust against both disturbance and parameter variations, and has low sensitivity to measurement noise. Furthermore, the stability for the control system with NADRC is theoretically proved.
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June 2018
Research-Article
Robust Voltage Control for an Electrostatic Micro-Actuator
Prasanth Kandula,
Prasanth Kandula
Mem. ASME
Department of Electrical Engineering
and Computer Science,
Cleveland State University,
2121 Euclid Avenue,
Cleveland, OH 44115
e-mail: p.kandula@vikes.csuohio.edu
Department of Electrical Engineering
and Computer Science,
Cleveland State University,
2121 Euclid Avenue,
Cleveland, OH 44115
e-mail: p.kandula@vikes.csuohio.edu
Search for other works by this author on:
Lili Dong
Lili Dong
Department of Electrical Engineering
and Computer Science,
Cleveland State University,
Cleveland, OH 44115
e-mail: L.Dong34@csuohio.edu
and Computer Science,
Cleveland State University,
2121 Euclid Avenue
,Cleveland, OH 44115
e-mail: L.Dong34@csuohio.edu
Search for other works by this author on:
Prasanth Kandula
Mem. ASME
Department of Electrical Engineering
and Computer Science,
Cleveland State University,
2121 Euclid Avenue,
Cleveland, OH 44115
e-mail: p.kandula@vikes.csuohio.edu
Department of Electrical Engineering
and Computer Science,
Cleveland State University,
2121 Euclid Avenue,
Cleveland, OH 44115
e-mail: p.kandula@vikes.csuohio.edu
Lili Dong
Department of Electrical Engineering
and Computer Science,
Cleveland State University,
Cleveland, OH 44115
e-mail: L.Dong34@csuohio.edu
and Computer Science,
Cleveland State University,
2121 Euclid Avenue
,Cleveland, OH 44115
e-mail: L.Dong34@csuohio.edu
1Corresponding author.
Contributed by the Dynamic Systems Division of ASME for publication in the JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received May 5, 2017; final manuscript received November 14, 2017; published online December 22, 2017. Assoc. Editor: Dumitru I. Caruntu.
J. Dyn. Sys., Meas., Control. Jun 2018, 140(6): 061012 (7 pages)
Published Online: December 22, 2017
Article history
Received:
May 5, 2017
Revised:
November 14, 2017
Citation
Kandula, P., and Dong, L. (December 22, 2017). "Robust Voltage Control for an Electrostatic Micro-Actuator." ASME. J. Dyn. Sys., Meas., Control. June 2018; 140(6): 061012. https://doi.org/10.1115/1.4038493
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