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Keywords: micro-electromechanical system
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Comput. Inf. Sci. Eng. March 2011, 11(1): 011005.
Published Online: March 30, 2011
...Takayuki Yamada; Shintaro Yamasaki; Shinji Nishiwaki; Kazuhiro Izui; Masataka Yoshimura Compliant mechanisms are designed to be flexible to achieve a specified motion as a mechanism. Such mechanisms can function as compliant thermal actuators in micro-electromechanical systems by intentionally...
