Research Papers

Modeling of Piezoelectric Bimorph Nano-Actuators With Surface Effects

[+] Author and Article Information
Chunli Zhang

Department of Civil Engineering,
University of Siegen,
Siegen 57068,
Department of Engineering Mechanics,
Zhejiang University,
Hangzhou 310027, China

Chuanzeng Zhang

Department of Civil Engineering,
University of Siegen,
Siegen 57068, Germany
e-mail: c.zhang@uni-siegen.de

Weiqiu Chen

Department of Engineering Mechanics,
Zhejiang University,
Hangzhou 310027, China

1Corresponding author.

Manuscript received December 12, 2012; final manuscript received December 31, 2012; accepted manuscript posted February 19, 2013; published online August 21, 2013. Editor: Yonggang Huang.

J. Appl. Mech 80(6), 061015 (Aug 21, 2013) (7 pages) Paper No: JAM-12-1552; doi: 10.1115/1.4023693 History: Received December 12, 2012; Revised December 31, 2012; Accepted February 19, 2013

Two-dimensional (2D) equations of piezoelectric bimorph nano-actuators are presented which take account of the surface effect. The surface effect of the bimorph structure is treated as a surface layer with zero thickness. The influence on the plate's overall properties resulted from the surface elasticity and piezoelectricity is modeled by a spring force exerting on the boundary of the bulk core. Using the derived 2D equations, the anti-parallel piezoelectric bimorph nano-actuators of both cantilever and simply supported plate type are investigated theoretically. Numerical results show that the effective properties and the deflections of the antiparallel bimorph nano-actuators are size-dependent. The deflection at the resonant frequency achieves nearly 50 times as that under the static driving voltage.

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Fig. 1

Schematic sketch of the piezoelectric bimorph with surface effect

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Fig. 2

Schematic sketch of antiparallel bimorph (a), cantilever plate antiparallel bimorph (b), and simply supported plate antiparallel bimorph (c)

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Fig. 5

The deflection versus the bimorph's thickness (the ratio of length-to-thickness is 80)

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Fig. 6

The normalized deflection at x1 = b for Case 1

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Fig. 10

The deflection with and without surface effect versus the driving frequency for Case 1 with 200 nm thickness (lr=80)

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Fig. 3

Miller–Shenoy coefficient

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Fig. 4

The maximum deflection of AlN nanobimorph actuators (Case 1: at x1 = b, Case 2: at x1 = 0)

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Fig. 7

The deflection versus the driving frequency for Case 1 and Case 2 with 300 nm thickness

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Fig. 8

The deflection versus the driving frequency for Case 1 with 200 nm and 300 nm thickness (lr=80)

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Fig. 9

The deflection versus the driving frequency for Case 1 with 200 nm and 300 nm thickness (2b=16μm)



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