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Keywords: MEMS
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Proceedings Papers

Proc. ASME. MN2008, ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials, 27-31, January 11–13, 2008
Publisher: American Society of Mechanical Engineers
Paper No: MN2008-47013
..., increases the driving electrostatic force, and increases the sensing capacitance. Symmetrical decoupled gyroscope MEMS finite element analysis Proceedings of MN2008 2nd International Conference and Exhibition on Multifunctional Nanocomposites and Nanomaterials January 11-13, 2008, Sharm El Sheikh...