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Technical Brief

An accurate thermo-mechanical model for laser-driven micro-transfer printing

[+] Author and Article Information
Yuyan Gao

Department of Engineering Mechanics and Soft Matter Research Center, Zhejiang University, Hangzhou 310027, China
18868111500@163.com

Yuhang Li

Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province, Zhejiang University, Hangzhou 310027, ChinaInstitute of Solid Mechanics, Beihang University (BUAA), Beijing 100191, ChinaState Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China
liyuhang@buaa.edu.cn

Rui Li

State Key Laboratory of Structural Analysis for Industrial Equipment, Department of Engineering Mechanics, Dalian University of Technology, Dalian 116024, China
ruili@dlut.edu.cn

Jizhou Song

Department of Engineering Mechanics and Soft Matter Research Center, Zhejiang University, Hangzhou 310027, ChinaKey Laboratory of Soft Machines and Smart Devices of Zhejiang Province, Zhejiang University, Hangzhou 310027, China
jzsong@zju.edu.cn

1Corresponding author.

ASME doi:10.1115/1.4036257 History: Received March 09, 2017; Revised March 11, 2017

Abstract

A recently developed transfer printing technique: laser-driven non-contact micro-transfer printing, which involves laser-induced heating to initiate the separation at the interface between the elastomeric stamp (e.g., PDMS) and hard micro-/nano-materials (e.g., Si chip), is valuable to develop advanced engineering systems such as stretchable and curvilinear electronics. The previous thermo-mechanical model has identified the delamination mechanism successfully. However, that model is not valid for small-size Si chip because the size effect is ignored for simplification in the derivation of the crack tip energy release rate. This paper establishes an accurate interfacial fracture mechanics model accounting for the size effect of the Si chip. The analytical predictions agree well with finite element analysis. This accurate model may serve as the theoretical basis for system optimization, especially for determining the optimal condition in the laser-driven non-contact micro-transfer printing.

Copyright (c) 2017 by ASME
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