Technical Brief

An Accurate Thermomechanical Model for Laser-Driven Microtransfer Printing

[+] Author and Article Information
Yuyan Gao

Department of Engineering Mechanics
and Soft Matter Research Center,
Zhejiang University,
Hangzhou 310027, China

Yuhang Li

Institute of Solid Mechanics,
Beihang University (BUAA),
Beijing 100191, China;
Key Laboratory of Soft Machines
and Smart Devices of Zhejiang Province,
Zhejiang University,
Hangzhou 310027, China;
State Key Laboratory of Digital Manufacturing
Equipment and Technology,
Huazhong University of Science and Technology,
Wuhan 430074, China

Rui Li

State Key Laboratory of Structural Analysis
for Industrial Equipment,
Department of Engineering Mechanics,
Dalian University of Technology,
Dalian 116024, China

Jizhou Song

Department of Engineering Mechanics,
Soft Matter Research Center,
Key Laboratory of Soft Machines
and Smart Devices of Zhejiang Province,
Zhejiang University,
Hangzhou 310027, China
e-mail: jzsong@zju.edu.cn

1Y. Gao and Y. Li contributed equally to this work.

2Corresponding author.

Contributed by the Applied Mechanics Division of ASME for publication in the JOURNAL OF APPLIED MECHANICS. Manuscript received March 9, 2017; final manuscript received March 11, 2017; published online April 12, 2017. Editor: Yonggang Huang.

J. Appl. Mech 84(6), 064501 (Apr 12, 2017) (4 pages) Paper No: JAM-17-1133; doi: 10.1115/1.4036257 History: Received March 09, 2017; Revised March 11, 2017

A recently developed transfer printing technique, laser-driven noncontact microtransfer printing, which involves laser-induced heating to initiate the separation at the interface between the elastomeric stamp (e.g., polydimethylsiloxane (PDMS)) and hard micro/nanomaterials (e.g., Si chip), is valuable to develop advanced engineering systems such as stretchable and curvilinear electronics. The previous thermomechanical model has identified the delamination mechanism successfully. However, that model is not valid for small-size Si chip because the size effect is ignored for simplification in the derivation of the crack tip energy release rate. This paper establishes an accurate interfacial fracture mechanics model accounting for the size effect of the Si chip. The analytical predictions agree well with finite element analysis. This accurate model may serve as the theoretical basis for system optimization, especially for determining the optimal condition in the laser-driven noncontact microtransfer printing.

Copyright © 2017 by ASME
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Grahic Jump Location
Fig. 2

The mechanics model to obtain the stress intensity factor K* at the crack tip A between PDMS and Si chip subjected to a uniform transformation strain within a circular region of radius R embedded in PDMS. (a) Schematic diagram of the analytical modeled system; (b) an approximate model for (a); (c) a uniform transformation strain spot embedded in PDMS bonded well with Si; and (d) interfacial crack with tractions prescribed on the faces.

Grahic Jump Location
Fig. 1

A typical laser-driven microtransfer printing cycle. (a) The elastomeric stamp is aligned with a donor substrate to retrieve the Si chip, (b) the Si chip is picked up by the stamp, (c) the stamp is aligned to a receiving substrate and a laser pulse is used to delaminate the stamp/Si chip interface, and (d) the Si chip is transferred onto the receiving substrate.

Grahic Jump Location
Fig. 3

The stress intensity factor K* at the interfacial crack tip A between PDMS and Si chip subjected to a uniform transformation strain within a circular region of radius 0.03 μm at different locations

Grahic Jump Location
Fig. 4

The scaling law for the delamination time at the PDMS/Si chip interface



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