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Technical Briefs

Characterization of Young’s Modulus of Nanowires on Microcantilever Beams

[+] Author and Article Information
Carmen M. Lilley

Department of Mechanical and Industrial Engineering, University of Illinois at Chicago, 2039 Engineering Research Facility, 842 W Taylor Street (MC 251), Chicago, IL 60607clilley@uic.edu

Jin He

Department of Mechanical and Industrial Engineering, University of Illinois at Chicago, 2039 Engineering Research Facility, 842 W Taylor Street (MC 251), Chicago, IL 60607jhe6@uic.edu

J. Appl. Mech 76(6), 064502 (Jul 21, 2009) (5 pages) doi:10.1115/1.3130443 History: Received February 27, 2007; Revised April 02, 2009; Published July 21, 2009

A new approach to measure the elastic modulus of nanowires is presented in this paper using a nanowire and a microcantilever beam composite system. The mechanical behavior of a nanowire-microcantilever beam structure under electrostatic actuation was studied using the finite element method, and a comparison of the resonance frequencies for a nanowire-microcantilever composite beam structure and a microcantilever beam only is presented. The test system can be optimized by introducing arrays of nanowires to increase the resonance frequency difference between the microcantilever beams and the nanowire array microbeam structures.

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Copyright © 2009 by American Society of Mechanical Engineers
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Figures

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Figure 1

Schematic illustration of a single NW fabricated on a MC beam surface and under electrostatic actuation (image is not to scale)

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Figure 2

The maximum transverse displacement of the MC beam under different voltages and with a 0 deg misalignment angle (circle: NW-MC; square: MC beam only)

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Figure 3

Resonance frequencies of the MC beam under different voltages and a misalignment angle of 0 deg (circle: NW-MC; square: MC beam only)

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Figure 4

Schematic illustration of NWs fabricated along the symmetric axis of the MC beam with a 0 deg misalignment

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Figure 5

Dependence of resonance frequencies on the NW-MC structure with an array of ten NWs on the beam surface as a function of varying NW width and thickness. The NWs are fabricated along the symmetric axis of the MC beam and the pitch width is w3=100 nm (circle: FEM, w2=100 nm, t2 varying; solid line: theory, w2=100 nm, t2 varying; square: FEM, t2=50 nm, w2 varying; dash line: theory, t2=50 nm, w2 varying).

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Figure 6

Schematic illustration of a NW array with a misalignment angle of θ=1 deg fabricated on a MC beam

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Figure 7

Convergence test of the NW array MC structure with misalignment angle: θ=1 deg

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Figure 8

Resonance frequencies for the NW array MC structure by assuming different NW overall Young’s moduli

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Figure 9

Variance of the relative uncertainty of NW overall Young’s modulus RE2 with respect to NW thickness. Ten NWs are fabricated along the symmetric axis of the MC beam. The NW width is w2=100 nm and the thickness t2 is varying.

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