Roman, M., and Aubry, N., 2003, “Design and Fabrication of Electrostatically Actuated Synthetic Microjets,” ASME, New York, AMD-259 , pp. 517–524.

Ko, S. C., Kim, Y. C., Lee, S. S., Choi, S. S., and Kim, S. R., 2003, “Micromachined Piezoelectric Membrane Acoustic Device,” Sens. Actuators, A

[CrossRef], 103 , pp. 130–134.

Mukherjee, S., 1982, "*Boundary Element Methods in Creep and Fracture*", Applied Science, London.

Banerjee, P. K., 1994, "*Boundary Element Methods in Engineering*", McGraw-Hill, Europe.

Chandra, A., and Mukherjee, S., 1997, "*Boundary Element Methods in Manufacturing*", Oxford University Press, New York.

Bonnet, A., 1999, "*Boundary Element Equation Methods for Solids and Fluids*", Wiley, Chichester, UK.

Mukherjee, S., and Mukherjee, Y. X., 2005, "*Boundary Methods: Elements, Contours and Nodes*", CRC, Boca Raton, FL.

Yang, T. Y., 1986, "*Finite Element Structural Analysis*", Prentice-Hall, Englewood Cliffs, NJ.

Zienkiewicz, O. C., and Taylor, R. L., 2005, "*The Finite Element Method*", Vols. 1 and 2 , 4th ed., McGraw-Hill, Berkshire, UK.

Hughes, T. J. R., 2000, "*The Finite Element Method: Linear Static and Dynamic Finite Element Analysis*", Dover, Mineola, NY.

Senturia, S. D., Harris, R. M., Johnson, B. P., Kim, S., Nabors, K., Shulman, M. A., and White, J. K., 1992, “A Computer Aided Design System for Microelectromechanical Systems (MEMCAD),” J. Microelectromech. Syst., 1 , pp. 3–13.

Nabors, K., and White, J., 1991, “FastCap: A Multi-Pole Accelerated 3-D Capacitance Extraction Program,” IEEE Trans. Comput.-Aided Des.

[CrossRef], 10 , pp. 1447–1459.

Gilbert, J. R., Legtenberg, R., and Senturia, S. D., 1995, “3D Coupled Electromechanics for MEMS: Applications of CoSolve-EM,” "*Proceedings of the IEEE MEMS*", pp. 122–127.

Shi, F., Ramesh, P., and Mukherjee, S., 1995, “Simulation Methods for Micro-Electro-Mechanical Structures (MEMS) With Applications to Microtweezer,” Comput. Struct.

[CrossRef], 56 , pp. 769–783.

Aluru, N. R., and White, J., 1997, “An Efficient Numerical Technique for Electromechanical Simulation of Complicated Microelectromechanical Structures,” Sens. Actuators, A

[CrossRef], 58 , pp. 1–11.

Shi, F., Ramesh, P., and Mukherjee, S., 1996, “Dynamic Analysis of Micro-Electro-Mechanical Systems,” Int. J. Numer. Methods Eng., 39 , pp. 4119–4139.

Ghosh, R., and Mukherjee, S., 2009, “Fully Lagrangian Modeling of Dynamics of MEMS With Thin Beams—Part I: Undamped Vibrations,” ASME J. Appl. Mech., 76 , p. 051007.

Ye, W., Wang, X., Hemmert, W., Freeman, D., and White, J., 2003, “Air Damping Forces in Laterally Oscillatory Microresonators: A Numerical and Experimental Study,” J. Microelectromech. Syst.

[CrossRef], 12 , pp. 557–566.

Mukherjee, S., Telukunta, S., and Mukherjee, Y. X., 2005, “BEM Modeling of Damping Forces on MEMS With Thin Plates,” Eng. Anal. Boundary Elem., 29 , pp. 1000–1007.

Li, G., and Aluru, N. R., 2003, “Efficient Mixed-Domain Analysis of Electrostatic MEMS,” IEEE Trans. Comput.-Aided Des.

[CrossRef], 22 , pp. 1228–1242.

De, S. K., and Aluru, N. R., 2004, “Full-Lagrangian Schemes for Dynamic Analysis of Electrostatic MEMS,” J. Microelectromech. Syst.

[CrossRef], 13 , pp. 737–758.

Pan, F., Kubby, J., Peeters, E., Tran, A. T., and Mukherjee, S., 1998, “Squeeze Film Damping Effect on the Dynamic Response of a MEMS Torsion Mirror,” J. Micromech. Microeng.

[CrossRef], 8 , pp. 200–208.

Frangi, A., and di Gioa, A., 2005, “Multipole BEM for Evaluating Damping Forces on MEMS,” Comput. Mech.

[CrossRef], 37 (1), pp. 24–31.

Ding, J., and Ye, W., 2004, “A Fast Integral Approach for Drag Force Calculation Due to Oscillatory Slip Stokes Flows,” Int. J. Numer. Methods Eng.

[CrossRef], 60 , pp. 1535–1567.

Hutcherson, S., and Ye, W., 2004, “On the Squeeze Film Damping of Micro-Resonators in the Free-Molecule Regime,” J. Micromech. Microeng.

[CrossRef], 14 , pp. 1726–1733.

Bhiladvala, R. B., and Wang, Z. J., 2004, “Effect of Fluids on the QFactor and Resonance Frequency of Oscillating Micrometer and Nanometer Scale Beams,” Phys. Rev. E

[CrossRef], 69 , p. 036307.

Bao, Z., Mukherjee, S., Roman, M., and Aubry, N., 2004, “Nonlinear Vibrations of Beams, Strings, Plates and Membranes Without Initial Tension,” ASME J. Appl. Mech.

[CrossRef], 71 (4), pp. 551–559.

Pozrikidis, C., 1992, "*Boundary Integral and Singularity Methods for Linearized Viscous Flow*", Cambridge University Press, Cambridge, UK.

Mukherjee, S., 2000, “CPV and HFP Integrals and Their Applications in the Boundary Element Method,” Int. J. Solids Struct., 37 , pp. 6623–6634.

Mukherjee, S., 2000, “Finite Parts of Singular and Hypersingular Integrals With Irregular Boundary Source Points,” Eng. Anal. Boundary Elem., 24 , pp. 767–776.

Bao, Z., and Mukherjee, S., 2004, “Electrostatic BEM for MEMS With Thin Conducting Plates and Shells,” Eng. Anal. Boundary Elem., 28 , pp. 1427–1435.

Liao, Y. S., Chyuan, S. W., and Chen, J. T., 2004, “Efficaciously Modeling Exterior Electrostatic Problems With Singularity for Electron Devices,” IEEE Circuits Devices Mag., Sept./Oct., pp. 25–34.

Cunha, F. C., De Sousa, A. J., and Loewenberg, M., 2003, “A Mathematical Formulation of the Boundary Integral Equations for the Compressible Stokes Flow,” Comput. Appl. Math., 22 (1), pp. 53–73.

Newmark, N. M., 1959, “A Method of Computation for Structural Dynamics,” J. Engrg. Mech. Div., 85 , pp. 67–94.

Belytschko, T., Liu, W. K., and Moran, B., 2000, "*Nonlinear Finite Element for Continua and Structures*", Wiley, New York.

Petersen, K. E., 1982, “Silicon as a Mechanical Material,” Proc. IEEE

[CrossRef], 70 , pp. 420–455.

Sharpe, W. N., 2001, “Mechanical Properties of MEMS Materials,” "*The MEMS Handbook*", CRC, Boca Raton, FL.

Hurty, W. C., and Rubinstein, M. F., 1964, "*Dynamics of Structures*", Prentice-Hall, Englewood Cliffs, NJ.

Telukunta, S., and Mukherjee, S., 2006, “Fully Lagrangian Modeling of MEMS With Thin Plates,” J. Microelectromech. Syst., 15 (4), pp. 795–810.