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TECHNICAL PAPERS

Large Deflection of Thin Plates in Pressure Sensor Applications

[+] Author and Article Information
P. Tong

Mechanical Engineering Department, Hong Kong University of Science and Technology, Clearwater Bay, Hong Kong, P. R. Chinae-mail: pintong@ust.hk

W. Huang

Department of Bioengineering, University of California, San Diego, La Jolla, CA 92093-0412

J. Appl. Mech 69(6), 785-789 (Oct 31, 2002) (5 pages) doi:10.1115/1.1507767 History: Received September 19, 2001; Revised June 08, 2002; Online October 31, 2002
Copyright © 2002 by ASME
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References

Cho,  S. T., Najafi,  K., and Wise,  K. D., 1992, “Internal Stress Compensation and Scaling in Ultra-Sensitive Silicon Pressure Sensors,” IEEE Trans. Electron Devices, 99(4), pp. 836–842.
Sheplak,  M., and Dugundji,  J., 1998, “Large Deflections of Clamped Circular Plates Under Initial Tension and Transitions to Membrane Behavior,” ASME J. Appl. Mech., 65, pp. 107–115.
Fung, Y. C., and Tong, P., 2001, Classical and Computational Solid Mechanics, World Scientific, Singapore.
O’Malley, R. E., 1991, Singular Perturbation Methods for Ordinary Differential Equations, Spring-Verlag, New York.

Figures

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Induced radial stress resultant to initial stress resultant ratios at x=0 (solid curve) and 1 (dot curve) for p=1000; correspondingly points “○” and “□” are for p=100
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log[sr(0)] (solid curve) and log[sr(1)] (dash curve) versus log(p) for k=5, 10, 20
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Induced stress resultant sr. The top three curves are for n0=0 and the lower three for n0=0.5 with p=100 (solid), 1000 (dot), 10000 (dash), respectively. The former case corresponds to k=0 and ke=7.2, 17.6, 39.6 and the latter case corresponds to k=10.8, 23.4, 50.3 and ke=11.6, 25.5, 53.4.
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Induced stress resultant sθ. The top three curves are for n0=0 and the lower three for n0=0.5 with p=100 (solid), 1000 (dot), 10000(dash), respectively. The former case corresponds to k=0 and ke=7.2, 17.6, 39.6 and the latter case corresponds to k=10.8, 23.4 50.3 and ke=11.6, 25.5, 53.4.
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Center deflection versus nondimensional pressure. Curves are the present results for k=5 (solid), 10 (dot), 20 (dash); points are from Ref. 2 for k=5(○),10(+), 20 (□).
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Linear (dot) and nonlinear (solid) normalized deflections w. The lowest pair of curves are for n0=0.5 and p=100. The top three pairs of curves are for n0=0.2 and p=10000, 1000, and 100, respectively.
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Normalized slope θ. The top two curves are the linear (dash-dot) and nonlinear (solid) solutions for n0=0.5 and p=100. The next three curves are for n0=0.2 and p=10000 (dash), 1000 (dot), and 100 (solid). The lowest curve (dash-dot) is the linear solution for n0=0.2 and p=100.
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log(ke) and log(p) for k=5, 10, 20

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