Thermodynamics of Thin Film Epitaxy

[+] Author and Article Information
R. C. Cammarata

Department of Materials Science and Engineering and Department of Mechanical Engineering, Johns Hopkins University, Baltimore, MD 21218-2689e-mail: rcc@jhu.edu

K. Sieradzki

Department of Mechanical and Aerospace Engineering and Center for Solid State Science, Arizona State University, Tempe, AZ 85287-6106e-mail: karl@icarus.eas.asu.edu

J. Appl. Mech 69(4), 415-418 (Jun 20, 2002) (4 pages) doi:10.1115/1.1468997 History: Received March 15, 2001; Revised December 10, 2001; Online June 20, 2002
Copyright © 2002 by ASME
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Grahic Jump Location
(a) Thermodynamic system for thin film epitaxy, (b) application of in-plane elastic strains to the film and surfaces, (c) application of in-plane creep strains to the film and surfaces that return the in-plane film area and surface areas to their initial values.
Grahic Jump Location
Representation ellipses for σijc (dashed) and Bijc/t (solid) when t is equal to the critical thickness; (a) general system where σijc and Bijc/t do not share the same set of principal axes, (b) system where σijc and Bijc/t share the same set of principal axes




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